Mat
J-GLOBAL ID:200909072828746071   JST material number (FULL):K19950475O   JST material number:K19950475

Chemical Vapor Deposition of Refractory Metals and Ceramics 3

JST material number:
JST material number
Identifier of Material (journals)
K19950475
ISBN (1): 1-55899-264-2
Series title  (1):
  • Materials Research Society Symposia Proceedings 363
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics, 3rd, Boston, Mass., 19941128 - 19941130
JST library information (0)

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