Mat
J-GLOBAL ID:200909073670273738   JST material number (FULL):K19900791S   JST material number:K19900791

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 1988

JST material number:
JST material number
Identifier of Material (journals)
K19900791
Series title  (1):
  • Proceedings. Electrochemical Society 89-7
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (3): Electrochemical Society. Dielectrics and Insulation Div. ,  Electrochemical Society. Electronics Div. ,  Electrochemical Society. High Temperature Materials Div.
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Chicago, Ill., 19881012 - 19881014
JST library information (0)

※Subject to change. Contact us for the latest status.


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