Mat
J-GLOBAL ID：200909076396227448
JST material number (FULL)：K19870077D
JST material number：K19870077
Reduced Temperature Processing for VLSI
JST material number：
JST material number
Identifier of Material (journals)
K19870077
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- Symposium on Reduced Temperature Processing for VLSI, Las Vegas, Nev., 19851013 - 19851015
JST library information (0)：
Subject to change. Contact us for the latest status.
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