J-GLOBAL ID:200909076850599428   JST material number (FULL):K19940697T   JST material number:K19940697

Diagnostic Techniques for Semiconductor Materials Processing

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-55899-223-5
Series title  (1):
  • Materials Research Society Symposia Proceedings 324
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on Diagnostic Techniques for Semiconductor Materials Processing, Boston, Mass., 19931129 - 19931202
JST library information (0)

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