Mat
J-GLOBAL ID:200909079808866326
JST material number (FULL):K19930514G
JST material number:K19930514
Proceedings of the Symposia on Patterning Science and Technology 2 / Interconnection and Contact Metallization for ULSI, 1991
JST material number:
JST material number
Identifier of Material (journals)
K19930514
ISBN (1):
1-56677-007-6
Series title (1):
- Proceedings. Electrochemical Society 92-6
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1):
English(EN)
Publisher:
Electrochemical Society
Publication place:Pennington, N.J.
Conference name (2):
- International Symposium on Patterning Science and Technology, 2nd, Phoenix, Ariz., 19911013 - 19911017
- Interconnection and Contact Metallization for ULSI Symposium, Phoenix, Ariz., 19911013 - 19911017
JST library information (0):
Subject to change. Contact us for the latest status.
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