J-GLOBAL ID:200909079808866326   JST material number (FULL):K19930514G   JST material number:K19930514

Proceedings of the Symposia on Patterning Science and Technology 2 / Interconnection and Contact Metallization for ULSI, 1991

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-56677-007-6
Series title  (1):
  • Proceedings. Electrochemical Society 92-6
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (2):
  • International Symposium on Patterning Science and Technology, 2nd, Phoenix, Ariz., 19911013 - 19911017
  • Interconnection and Contact Metallization for ULSI Symposium, Phoenix, Ariz., 19911013 - 19911017
JST library information (0)

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