Mat
J-GLOBAL ID：200909088040140451
JST material number (FULL)：K19910548H
JST material number：K19910548
Proceedings of the 8th Symposium on Plasma Processing, 1990
JST material number：
JST material number
Identifier of Material (journals)
K19910548
Series title (1)：
- Proceedings. Electrochemical Society 90-14
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (2)：
Electrochemical Society. Dielectric Science and Technology Div.
, Electrochemical Society. Electronics Div.
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- Symposium on Plasma Processing, 8th, Montreal, 19900506 - 19900511
JST library information (0)：
Subject to change. Contact us for the latest status.
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