Mat
J-GLOBAL ID:200909088057651786   JST material number (FULL):K19880680Y   JST material number:K19880680

Laser and Particle-Beam Chemical Processing for Microelectronics

JST material number:
JST material number
Identifier of Material (journals)
K19880680
ISBN (1): 0-931837-69-3
Series title  (1):
  • Materials Research Society Symposia Proceedings 101
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (1): United States. Air Force. Office of Scientific Research
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium (on) Laser and Particle-Beam Chemical Processing for Microelectronics, Boston, Mass., 19871201 - 19871203
JST library information (0)

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