Mat
J-GLOBAL ID:200909089454275789   JST material number (FULL):K19930390G   JST material number:K19930390

Chemical Vapor Deposition of Refractory Metals and Ceramics 2

JST material number:
JST material number
Identifier of Material (journals)
K19930390
ISBN (1): 1-55899-144-1
Series title  (1):
  • Materials Research Society Symposia Proceedings 250
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics, 2nd, Boston, Mass., 19911204 - 19911206
JST library information (0): Subject to change. Contact us for the latest status.

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