J-GLOBAL ID:200909097525091288   JST material number (FULL):K19880221V   JST material number:K19880221

Tungsten and Other Refractory Metals for VLSI Applications 2

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 0-931837-66-9
Series title  (1):
  • Materials Research Society Conference Proceedings VLSI-2
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (1): California Univ. Berkeley. Univ. Extension
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Workshop on Tungsten and Other Refractory Metals for VLSI Applications, 3rd, Palo Alto, Calif., 19861112 - 19861114
JST library information (0)

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