Mat
J-GLOBAL ID：200909097525091288
JST material number (FULL)：K19880221V
JST material number：K19880221
Tungsten and Other Refractory Metals for VLSI Applications 2
JST material number：
JST material number
Identifier of Material (journals)
K19880221
ISBN (1)：
0-931837-66-9
Series title (1)：
- Materials Research Society Conference Proceedings VLSI-2
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (1)：
California Univ. Berkeley. Univ. Extension
Publisher：
Materials Research Society
Publication place：Pittsburgh, Pa.
Conference name (1)：
- Workshop on Tungsten and Other Refractory Metals for VLSI Applications, 3rd, Palo Alto, Calif., 19861112 - 19861114
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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