Mat
J-GLOBAL ID:200909097525091288
JST material number (FULL):K19880221V
JST material number:K19880221
Tungsten and Other Refractory Metals for VLSI Applications 2
JST material number:
JST material number
Identifier of Material (journals)
K19880221
ISBN (1):
0-931837-66-9
Series title (1):
- Materials Research Society Conference Proceedings VLSI-2
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1):
English(EN)
Editor/ Editing house (1):
California Univ. Berkeley. Univ. Extension
Publisher:
Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name (1):
- Workshop on Tungsten and Other Refractory Metals for VLSI Applications, 3rd, Palo Alto, Calif., 19861112 - 19861114
JST library information (0)
※:
※Subject to change. Contact us for the latest status.
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