Mat
J-GLOBAL ID:200909099082768703   JST material number (FULL):K19980242L   JST material number:K19980242

Advanced Metallization and Interconnect Systems for ULSI Applications in 1997

JST material number:
JST material number
Identifier of Material (journals)
K19980242
ISBN (1): 1-55899-412-2
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (1): California Univ. Berkeley. Univ. Extension
Publisher: TMS Minerals, Metals & Materials Society
Publication place:Warrendale, Pa.
Conference name  (2):
  • Conference on Advanced Metallization and Interconnect Systems for ULSI Applications, 14th, San Diego, Calif., 19970930 - 19971002
  • Conference on Advanced Metallization and Interconnect Systems for ULSI Applications. Parallel Session, Tokyo, 19971021 - 19971022
JST library information (0)

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