Mat
J-GLOBAL ID：200909099082768703
JST material number (FULL)：K19980242L
JST material number：K19980242
Advanced Metallization and Interconnect Systems for ULSI Applications in 1997
JST material number：
JST material number
Identifier of Material (journals)
K19980242
ISBN (1)：
1-55899-412-2
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (1)：
California Univ. Berkeley. Univ. Extension
Publisher：
TMS Minerals, Metals & Materials Society
Publication place：Warrendale, Pa.
Conference name (2)：
- Conference on Advanced Metallization and Interconnect Systems for ULSI Applications, 14th, San Diego, Calif., 19970930 - 19971002
- Conference on Advanced Metallization and Interconnect Systems for ULSI Applications. Parallel Session, Tokyo, 19971021 - 19971022
JST library information (0)：
Subject to change. Contact us for the latest status.
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