Research field (5):
Nanobioscience
, Electric/electronic material engineering
, Thin-film surfaces and interfaces
, Nano/micro-systems
, Nanomaterials
Research keywords (1):
Inetegrated MEMS, Optical MEMS, Bio-MEMS, Bacterial Sensor, Bacterial Ethology, Stress Response, Semiconductor, LSI, Multilevel Interconnection, Selective Growth, Electrodeposition, Atomic Layer Epitaxy, Chemical Vapor Deposition, Catalyst, Surface Reaction, XAFS, XPS