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J-GLOBAL ID:201002013368503700   Reference number:75A0295187

IC製造用光学機器

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Volume: 44  Issue:Page: 526-532  Publication year: 1975 
JST Material Number: F0252A  ISSN: 0369-8009  CODEN: OYBSA  Document type: Article
Article type: 文献レビュー  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Reference (18):
  • 1) 脇本善司,川上忠志:応用物理, 40 (1971) 1014.
  • 2) 一ノ瀬和三郎:精密機械, 41 (1975) 46,
  • 3) M. J. Cowan, D. R. Herriott, A. M. Johnson and A. Zacharias: The Bell System Tech. J., Nov. (1970) 2033.
  • 4) Thomson-CSF のカタログより.
  • 5) 秋山裕爾,他: Nikon Tech. J., No. 1 (1973) 39.
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