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J-GLOBAL ID:201002016740533475   Reference number:79A0207205

Numerical solution of phosphorus diffusion equation in silicon.

シリコン中のりんの拡散方程式の数値解
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Volume: 18  Issue:Page: 479-489  Publication year: 1979 
JST Material Number: G0520A  CODEN: JJAPA  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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