Thermal diffusivity, specific heat and thermal conductivity of chemically vapor-deposited Si<sub>3</sub>N<sub>4</sub>.

HIRAI T; HAYASHI S; NIIHARA K

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J-GLOBAL ID：201002018821101300 Reference number：79A0119873

Thermal diffusivity, specific heat and thermal conductivity of chemically vapor-deposited Si₃N₄.

化学的に蒸気析出したSi₃N₄の熱拡散,比熱,熱伝導率

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Volume： 57 Issue： 12 Page： 1126-1130 Publication year： 1978
JST Material Number： A0366A ISSN： 0002-7820 CODEN： BACSA Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thermal diffusivity, specific heat and thermal conductivity of chemically vapor-deposited Si3N4.

Thermal diffusivity, specific heat and thermal conductivity of chemically vapor-deposited Si₃N₄.