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J-GLOBAL ID:201002023516651809   Reference number:76A0172800

Electron-projection microfabrication system.

電子投影方式のミクロファブリケーションシステム
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Volume: 12  Issue:Page: 1135-1140  Publication year: 1975 
JST Material Number: C0789A  ISSN: 0022-5355  CODEN: JVSTA  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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