Application of a thermal field emission source for high resolution, high current e-beam microprobes.

TUGGLE D; SWANSON L W; ORLOFF J

Art

J-GLOBAL ID：201002024400705371 Reference number：80A0257847

Application of a thermal field emission source for high resolution, high current e-beam microprobes.

熱電界放出源の高分解能高電流電子線マイクロプローブへの応用

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Material：
Volume： 16 Issue： 6 Page： 1699-1703 Publication year： 1979
JST Material Number： C0789A ISSN： 0022-5355 CODEN： JVSTA Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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