Art
J-GLOBAL ID：201002028041016919   Reference number：79A0139272

An automatic focusing and stigmating system for the SEM.

走査電子顕微鏡の自動焦点合せと非点補正系
Author (3)：
TEE W J

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SMITH K C A

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, 
HOLBURN D M

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Material：
J Phys E  (Journal of Scientific Instruments (Journal of Physics E))

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Volume： 12  Issue： 1  Page： 35-38  Publication year： 1979 
JST Material Number： C0354B  ISSN： 0022-3735  CODEN： JPSIAE  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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走査電子顕微鏡

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走査電子顕微鏡

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自動焦点合せ

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点

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