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J-GLOBAL ID：201002053638885866   Reference number：75A0346737

Topologically structured thin films in semiconductor device operation.

半導体素子用トポロジー構造薄膜
Author (2)：
NATHANSON H C

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GULDBERG J

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Material：
Phys Thin Films  (Physics of Thin Films)

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Volume： 8  Page： 251-333  Publication year： 1975 
JST Material Number： A0210A  ISSN： 0079-1970  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
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半導体素子

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半導体素子

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, 
トポロジー

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薄膜

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