Art
J-GLOBAL ID：201002055789079376   Reference number：79A0245113

Temperature-compensated surface-acoustic-wave devices with SiO2 film overlays.

SiO2薄膜被覆をもつ温度補償表面音響波デバイス
Author (2)：
PARKER T E

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, 
WICHANSKY H

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Material：
J Appl Phys  (Journal of Applied Physics)

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Volume： 50  Issue： 3 Pt 1  Page： 1360-1369  Publication year： 1979 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIA  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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弾性表面波デバイス

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Terms in the title (4)：
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SiO2

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, 
薄膜

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, 
温度補償

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, 
表面音響波デバイス

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