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J-GLOBAL ID：201002061685773459   Reference number：75A0298398

Characterization of positive photoresist.

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Author (4)：
DILL F H

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, 
HORNBERGER W P

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, 
HAUGE P S

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SHAW J M

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Material：
I E E E Trans Electron Devices (Inst Electr Electron Eng)  (IRE Transactions on Electron Devices)

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Volume： 22  Issue： 7  Page： 445-452  Publication year： 1975 
JST Material Number： C0222A  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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