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J-GLOBAL ID:201002064056639692   Reference number:77A0189679

Plasma etching in integrated circuit manufacture - A review.

集積回路製作におけるプラズマ・エッチング レビュー
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Volume: 14  Issue:Page: 266-274  Publication year: 1977 
JST Material Number: C0789A  ISSN: 0022-5355  CODEN: JVSTA  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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