Plasma etching in integrated circuit manufacture - A review.

POULSEN R G

Art

J-GLOBAL ID：201002064056639692 Reference number：77A0189679

Plasma etching in integrated circuit manufacture - A review.

集積回路製作におけるプラズマ・エッチングレビュー

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Volume： 14 Issue： 1 Page： 266-274 Publication year： 1977
JST Material Number： C0789A ISSN： 0022-5355 CODEN： JVSTA Document type： Article
Article type：解説 Country of issue： United States (USA) Language： ENGLISH (EN)

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