Studies of the optimum conditions for growth of rf-sputtered ZnO films.

KHURI-YAKUB B T; KINO G S; GALLE P

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J-GLOBAL ID：201002064438249266 Reference number：75A0351118

Studies of the optimum conditions for growth of rf-sputtered ZnO films.

rfスパッタZnO膜の育成最適条件の研究

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Volume： 46 Issue： 8 Page： 3266-3272 Publication year： 1975
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIA Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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