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J-GLOBAL ID:201002071574260156   Reference number:77A0287132

Large-area uniform growth of 〈100〉 Si through Al film by solid epitaxy.

固相エピタキシーによるAl膜を通しての〈100〉Siの大面積均一成長
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Volume: 31  Issue:Page: 125-126  Publication year: 1977 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLA  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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