Plasma etching - A “pseudo-black-box” approach.

WINTERS H F; COBURN J W; KAY E

Art

J-GLOBAL ID：201002074806705671 Reference number：78A0133889

Plasma etching - A “pseudo-black-box” approach.

プラズマエッチング擬ブラック・ボックス的アプローチ

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Material：
Volume： 48 Issue： 12 Page： 4973-4983 Publication year： 1977
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIA Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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