Determination of boron and phosphorus concentration in silicon by photoluminescence analysis.

TAJIMA M

Art

J-GLOBAL ID：201002088857182763 Reference number：78A0256396

Determination of boron and phosphorus concentration in silicon by photoluminescence analysis.

光ルミネセンス解析によるシリコン中のほう素とりん濃度の決定

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Volume： 32 Issue： 11 Page： 719-721 Publication year： 1978
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLA Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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