Art
J-GLOBAL ID：201002091486707842   Reference number：80A0304397

Refractory silicides for integrated circuits.

集積回路用耐火けい化物
Author (1)：
MURARKA S P

About MURARKA S P

(Bell Lab., New Jersey)

About Bell Lab., New Jersey


Material：
J Vac Sci Technol  (Journal of Vacuum Science & Technology)

About J Vac Sci Technol


Volume： 17  Issue： 4  Page： 775-792  Publication year： 1980 
JST Material Number： C0789A  ISSN： 0022-5355  CODEN： JVSTA  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
集積回路

About 集積回路

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=80A0304397&from=J-GLOBAL&jstjournalNo=C0789A") }}
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
集積回路

About 集積回路

, 
耐火

About 耐火

, 
けい化物

About けい化物


Return to Previous Page

TOP

BOTTOM