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J-GLOBAL ID：201002093055789356   Reference number：79A0187582

Analysis of grating imaging and its application to displacement metrology.

格子像の解析とその変位測定への応用
Author (1)：
PETTIGREW R M

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Material：
Proc Soc Photo Opt Instrum Eng  (Proceedings of the Society of Photo-Optical Instrumentation Engineers)

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Volume： 136  Page： 325-332  Publication year： 1978 
JST Material Number： D0943A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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回折格子

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格子像

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, 
解析

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変位測定

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応用

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