Art

J-GLOBAL ID：201002219393558240   Reference number：10A0761778

Effect of increasing hardness on Si-containing diamond-like carbon film during tribo-test

摩擦試験でのSiを含むダイアモンドライクカーボン膜に対する硬度増大の影響

Author (4)： KIM S.g. (Surface Technol. and Heat Treatment R&D Dep., Korea Inst. of Industrial Technol., 7-47, Songdo-Dong, Yeonsu-Gu ...) ,  KIM S.w. (Surface Technol. and Heat Treatment R&D Dep., Korea Inst. of Industrial Technol., 7-47, Songdo-Dong, Yeonsu-Gu ...) ,  SAITO N. (Dep. of Materials Sci. and Engineering, Nagoya Univ., 464-8603, JPN) ,  TAKAI O. (Dep. of Materials Sci. and Engineering, Nagoya Univ., 464-8603, JPN)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 19  Issue： 7-9  Page： 1017-1020  Publication year： Jul. 2010 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： diamond ,  diamond-like carbon ,  *DLC film ,  silicon ,  dopant ,  tribology ,  abrasion test ,  friction test ,  concentration dependence ,  hardness

JST classification (3)： Carbon and its compounds  (YB02060D) ,  Lubrication in general  (QB02010S) ,  Thin films of other inorganic compounds  (BK14060A)

Terms in the title (3)： 摩擦試験 ,  Si ,  硬度