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J-GLOBAL ID:201002252602495991   Reference number:10A0356137

Optimization of Intensity Distribution in Laser Drilling

レーザ穴明けにおける加工部強度分布の最適化
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Volume: 76  Issue:Page: 415-419  Publication year: Apr. 05, 2010 
JST Material Number: F0268B  ISSN: 1348-8716  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Special machining 
Reference (11):
  • 1) 磯圭二:CO2/UV レーザドリル微細加工, 精密工学会第289回講習会「新ものづくり時代を切り拓くレーザ加工技術」テキスト, (2003), 15 (in Japanese).
  • 2) D. Shafer : Gaussian to flat-top intensity distributing lens, Optics & Laser Technology, <b>14</b> (1982) 159.
  • 3) K. Ebata, M. Shiozaki et. al. : Characteristics Of ZnSe Aspheric Beam Shaper for CO2 laser, Proceedings of SPIE, 4443 (2001) 125.
  • 4) S. Noguchi and E. Ohmura : Analysis on resin removal in laser drilling of printed circuit board considering diffraction in image formation optical system, J. Jpn. Soc. Precis. Eng. 71, 10 (2005) 1296 (in Japanese).
  • 5) 村田和美:光学, サイエンス社, (2002) 85 (in Japanese).
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