Art
J-GLOBAL ID：201002256790715591   Reference number：10A0346740

Low work function nanometer-order controlled transfer mold field-emitter arrays

低仕事関数ナノメータオーダー制御移送成形フィールドエミッタアレイ
Author (3)：
NAKAMOTO Masayuki

About NAKAMOTO Masayuki

(Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN)

About Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN

, 
MOON Jonghyun

About MOON Jonghyun

(Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN)

About Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN

, 
SHIRATORI Koji

About SHIRATORI Koji

(Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN)

About Res. Inst. of Electronics, Shizuoka Univ., 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, JPN


Material：
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)

About Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena


Volume： 28  Issue： 2  Page： C2B1  Publication year： Mar. 2010 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Gold

About Gold

, 
*work function

About work function

, 
transfer molding

About transfer molding

, 
metallic thin film

About metallic thin film

, 
*film thickness

About film thickness

, 
chip

About chip

, 
turn-on

About turn-on

, 
*titanium nitride

About titanium nitride


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*フィールドエミッタアレイ

About フィールドエミッタアレイ


JST classification (4)：
JST classification
Category name(code) classified by JST.
Other solid-state devices 
(NC03150A)

About Other solid-state devices

,  Metallic thin films 
(BK14030T)

About Metallic thin films

,  Electron emission in general 
(BM09010H)

About Electron emission in general

,  Thermoionic emission and field emission 
(BM09020S)

About Thermoionic emission and field emission

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
仕事関数

About 仕事関数

, 
ナノメータ

About ナノメータ

, 
オーダー

About オーダー

, 
移送成形

About 移送成形

, 
フィールドエミッタアレイ

About フィールドエミッタアレイ


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