Art

J-GLOBAL ID：201002259126514898   Reference number：10A0135368

Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

数10nm変位測定用の空気結合超音波による改良型位相検出法

Author (3)： SASAKI Katsuhiro (Dep. of Electrical and Electronic Engineering, Fac. of Engineering and Resource Sci., Akita Univ.) ,  NISHIHIRA Morimasa (Dep. of Electrical and Electronic Engineering, Fac. of Engineering and Resource Sci., Akita Univ.) ,  IMANO Kazuhiko (Dep. of Electrical and Electronic Engineering, Fac. of Engineering and Resource Sci., Akita Univ.)
Material： IEICE Electronics Express (Web)  (IEICE Electron Express (Web))
Volume： 1  Issue： 15  Page： 472-476 (J-STAGE)  Publication year： 2004 
JST Material Number： U0039A  ISSN： 1349-2543  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *displacement measurement ,  *ultrasonic measurement ,  phase detection ,  resolving power ,  high sensitivity ,  measurement accuracy

JST classification (1)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O)

Reference (5)：

• [1] D. Marioli, C. Narduzzi, C. Offelli, D. Petri, E. Sardini, and A. Taroni, “Digital time-of-flight measurement for ultrasonic sensors, ” IEEE Trans. Instrum. Meas., vol. 41, pp. 93-97, 1992.
• [2] T. Kimura, S. Wadaka, K. Misu, T. Nagatsuka, T. Tajime, and M. Koike, “A high resolution ultrasonic range measurement method using double frequencies and phase detection, ” Proc. IEEE Ultrason. Symp., vol. 1, pp. 737-741, 1995.
• [3] Z. Kojiro, T. J. Kim, G. Lippold, T. Gudra, and W. Grill, “Distance resolution of the scanning acoustic air microscope, ” Ultrasonics, vol. 35, pp. 563-567, 1998.
• [4] K. Sasaki, M. Nishihira, and K. Imano, “Sub-micrometer order displacement measurements using an air-coupled ultrasonic transducer at frequencies of 40 and 400kHz, ” Jpn. J. Appl. Phys., vol. 43, no. 5B, pp. 3071-3075, 2004.
• [5] K. Imano and H. Inoue, “Measurement of micrometer order displacement using phase-shift type ultrasonic correlation system in MHz range, ” Jpn. J. Appl. Phys., vol. 35, no. 5B, pp. 3177-3179, 1996.

Terms in the title (4)： 変位測定 ,  超音波 ,  位相 ,  検出法