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J-GLOBAL ID:201002271127591799   Reference number:10A0287379

Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology

CMOS技術で作製したシリコン・オン・インシュレータ(SOI)スペクトルフィルタ
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Volume: 16  Issue:Page: 33-44  Publication year: Jan. 2010 
JST Material Number: W0734A  ISSN: 1077-260X  CODEN: IJSQEN  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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