Art

J-GLOBAL ID：201002276282213905   Reference number：10A1539324

In situ observation of self-organizing nanodot formation under nanosecond-pulsed laser irradiation on Si surface

Si表面のナノ秒パルスレーザ照射下における自己組織化ナノドット形成のその場観察

Author (6)： WATANABE S. (Center for Advanced Res. of Energy and Materials, Fac. of Engineering, Hokkaido Univ., N13, W8, Kita-ku, Sapporo ...) ,  YOSHIDA Y. (Div. of Quantum Sci. and Engineering, Graduate School of Engineering, Hokkaido Univ., Kita-13, Nishi-8, Kita-ku ...) ,  KAYASHIMA S. (Div. of Quantum Sci. and Engineering, Graduate School of Engineering, Hokkaido Univ., Kita-13, Nishi-8, Kita-ku ...) ,  YATSU S. (Center for Advanced Res. of Energy and Materials, Fac. of Engineering, Hokkaido Univ., N13, W8, Kita-ku, Sapporo ...) ,  KAWAI M. (High Energy Accelerator Res. Organization, 1-1 Oho, Tsukuba-shi, Ibaraki-ken 305-0801, JPN) ,  KATO T. (Materials Res. Lab., Hitachi Ltd., 7-1-1 Omika, Hitachi-shi, Ibaraki-ken 319-1292, JPN)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 108  Issue： 10  Page： 103510  Publication year： Nov. 15, 2010 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： silicon ,  surface ,  nanosecond ,  *pulsed laser irradiation ,  self-organizing ,  *nanostructure ,  in situ observation ,  array ,  high voltage electron microscope ,  epitaxy ,  surface diffusion ,  two dimension
Semi thesaurus term： *nanodot ,  atomic cluster

JST classification (2)： Thin films in general  (BK14010X) ,  Laser irradiation effects and damages  (BK16040S)

Terms in the title (5)： Si ,  ナノ秒パルスレーザ ,  自己組織化 ,  ナノドット ,  その場観察