Art
J-GLOBAL ID:201002276676630277   Reference number:10A0537233

A newly developed three-dimensional profile scanner with nanometer spatial resolution

ナノメートルの空間分解能を持つ新たに開発した三次元輪郭スキャナ
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Volume: 59  Issue:Page: 525-528  Publication year: 2010 
JST Material Number: E0026A  ISSN: 0007-8506  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Measuring methods and instruments of length,area,cross section,volume,angle 
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