Art
J-GLOBAL ID:201002279789483172   Reference number:10A1048767

Microwave heating behaviors of Si substrate materials in a single-mode cavity

Si基板材料の単一モード空洞におけるマイクロ波加熱挙動
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Material:
Volume: 124  Issue: 2-3  Page: 900-903  Publication year: Dec. 01, 2010 
JST Material Number: E0934A  ISSN: 0254-0584  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Heating  ,  Inorganic compounds and elements in general 
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