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J-GLOBAL ID:201002288823426239   Reference number:10A0050872

未来を変えるMEMS技術 MEMSとネイチャーインタフェイス

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Volume: 16  Issue:Page: 24-30  Publication year: Jan. 01, 2010 
JST Material Number: L4454A  ISSN: 1341-3961  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Solic-state devices in general 
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