Art
J-GLOBAL ID:201002299454533540   Reference number:10A0626852

Development of large diameter ECR plasma source

大直径ECRプラズマ源の開発
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Material:
Volume: 84  Issue: 12  Page: 1381-1384  Publication year: Jun. 25, 2010 
JST Material Number: E0347A  ISSN: 0042-207X  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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Plasma devices 
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