About KAWAI Yoshinobu
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasuga, Fukuoka 816-8580, JPN
About UCHINO Kiichiro
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasuga, Fukuoka 816-8580, JPN
About MUTA Hiroshi
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasuga, Fukuoka 816-8580, JPN
About KAWAI Shinji
About The Res. Center for Photovoltaics, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, Ibaraki ...
About ROEWF Tobias
About neoplas GmbH, Walther-Rathenau-Strasse 49a, 17489 Greifswald, DEU
About Vacuum
About electron cyclotron resonance plasma
About plasma source
About ion current
About pressure effect
About electron temperature
About electric power
About ion saturation current
About Plasma devices
About 大直径
About ECRプラズマ
About 開発