MEMS sensor

電子素子
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Narrower terms (5)：

nanosensor (ナノセンサ)
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membrane sensor (膜センサ)
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MEMS blood flow sensor (MEMS血流量センサ)
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diamond MEMS magnetic sensor (ダイヤモンドMEMS磁気センサ)
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MEMS accelerometer (MEMS加速度センサ)
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