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Art
J-GLOBAL ID:201102204619739625   Reference number:11A0437885

High-density microwave plasma-enhanced chemical vapor deposition of microcrystalline silicon from dichlorosilane

ジクロロシランからの微晶質ケイ素の高密度マイクロ波プラズマ増強化学蒸着
Author (6):
Material:
Volume: 516  Issue: 19  Page: 6585-6591  Publication year: 2008
JST Material Number: O6387A  ISSN: 0040-6090  Document type: Article
Country of issue: Other (ZZZ)  Language: ENGLISH (EN)
Terms in the title (5):
Terms in the title
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