Art

J-GLOBAL ID：201102205898693393   Reference number：11A0494456

常温接合を用いた積層造形法におけるオーバーレイ誤差の要因解析

Author (2)： YAMADA TAKAYUKI (富士ゼロックス) ,  MITSUI KIMIYUKI (慶応大)
Material： 精密工学会誌  (Journal of the Japan Society for Precision Engineering)
Volume： 77  Issue： 2  Page： 218-223  Publication year： Feb. 05, 2011 
JST Material Number： F0268C  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *bonding and joining ,  *bonding ,  *laminate structure ,  *error analysis ,  *factor analysis ,  fine patterning ,  systematic error ,  superposition ,  molecular pump ,  shape measurement ,  alignment ,  positioning ,  Computer Simulation ,  measurement error ,  thermal deformation ,  *additive manufacturing ,  random error ,  form error ,  machining accuracy ,  turbo molecular pump ,  *Mathematics ,  *analysis ,  *theory of errors ,  computer application ,  utilization
Semi thesaurus term： machining accuracy ,  *room temperature bonding ,  *layered manufacturing ,  turbo molecular pump

JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Other moldings  (YH04090Q)

Reference (11)：

• 1) T. Oba et. al. : Development of CAPP/CAM System for 5-axis Control Machining, J. Jpn. Soc. Precis. Eng., 76, 1, (2010) 90 (in Japanese).
• 2) M. Kunieda et. al. : Study on 5-Axis Dry EDM, J. Jpn. Soc. Precis. Eng., 73, 8, (2007) 940 (in Japanese).
• 3) S. Matsui. : Three-Dimensional Nanotechnology Using Focused-Ion-Beam and Its Applications, J. Surf. Finish. Soc. Jpn., 56, 7, (2005) 361 (in Japanese).
• 4) S. Matsui. : Nanoimprint Technology, J. Surf. Sci. Soc. Jpn., 25, 10, (2004) 628 (in Japanese).
• 5) T. Yamada and M. Takahashi : Proposal and Verification of a Novel Fabrication Method for 3-D Microstructures, J. Jpn. Soc. Precis. Eng., 66, 8, (2000) 1265 (in Japanese).

Terms in the title (5)： 常温接合 ,  積層造形法 ,  オーバーレイ ,  誤差 ,  要因解析