Temperature Measurement of Semitransparent Silicon Wafers Based Upon Absorption Edge Wavelength Shift

IUCHI T.; SEO T.

Art

J-GLOBAL ID：201102222950914591 Reference number：11A1574139

Temperature Measurement of Semitransparent Silicon Wafers Based Upon Absorption Edge Wavelength Shift

吸収端波長シフトに基づく半透明シリコンウエハの温度測定

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Volume： 31 Issue： 8-9 Page： 1533-1543 Publication year： Sep. 2010
JST Material Number： D0648B ISSN： 0195-928X CODEN： IJTHDY Document type： Article
Country of issue： United States (USA) Language： ENGLISH (EN)

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