Art

J-GLOBAL ID：201102228460069832   Reference number：11A1754842

Preparation and characterization of unimorph actuators based on piezoelectric Pb(Zr_0.52Ti_0.48)O₃ materials

圧電Pb(Zr_0.52Ti_0.48)O₃材料に基づくユニモルフアクチュエータの製作と特性評価

Author (6)： YIN Yi (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN) ,  YE Hui (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN) ,  ZHAN Wenbo (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN) ,  HONG Liang (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN) ,  MA Haimin (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN) ,  XU Jian (State Key Lab. of Modern Optical Instrumentation, Zhejiang Univ., Hangzhou 310027, Zhejiang, CHN)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 171  Issue： 2  Page： 332-339  Publication year： Nov. 2011 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： piezoelectric material ,  *lead zirconate titanate ,  *actuator ,  reflecting mirror ,  electrode ,  diaphragm (machine element) ,  wafer ,  SOI structure ,  lead titanate ,  buffer layer ,  sol-gel process ,  deflection(material phenomenon) ,  *MEMS ,  etching ,  wet etching ,  micromirror
Semi thesaurus term： MEMS mirror ,  PZT ,  comb-type electrode

JST classification (2)： Piezoelectric devices  (NC03110I) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (5)： 圧電 ,  Pb ,  O3 ,  製作 ,  特性評価