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J-GLOBAL ID:201102236649307842   Reference number:11A0142744

Development of Multi-Degrees-of-Freedom Microscope Stage Constructed of Electromagnetic Actuator Using Rubber

ゴムを用いた電磁アクチュエータによる顕微作業用多自由度精密ステージの開発
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Volume: 76  Issue: 772  Page: 3672-3679  Publication year: Dec. 25, 2010 
JST Material Number: F0045B  ISSN: 0387-5024  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Design,manufacturing,and components of robots 
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