About Shen Weidong
About State Key labs of Modern Optical Instrumentation;Zhejiang Univ., Hangzhou
About Wu Yaming
About Shanghai Inst. of Microsystem and Information Technol., Chinese Acad. of Sciences, Shanghai
About Zhang Yueguang
About State Key labs of Modern Optical Instrumentation;Zhejiang Univ., Hangzhou
About Liu Xu
About State Key labs of Modern Optical Instrumentation;Zhejiang Univ., Hangzhou
About Gu Peifu
About State Key labs of Modern Optical Instrumentation;Zhejiang Univ., Hangzhou
About Zhenkong Kexue yu Jishu Xuebao
About bonding and joining
About wafer
About silicon
About SOI structure
About bond strength
About SIMOX
About MEMS
About etching
About layer
About glass
About thin film growth
About electron beam deposition
About evaporated film
About silicon substrate
About bond strength
About interlayer
About anodic bonding
About Manufacturing technology of solid-state devices
About TMAH
About 電子ビーム蒸着
About 成膜
About ガラス膜
About アノードボンディング