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J-GLOBAL ID:201102250499258000   Reference number:11A1827300

Estimation of Minimum Size of Electrodes for Face-to-Face Double Probe using Two-Dimensional Particle-in-Cell Simulation

二次元パーティクル-イン-セルシミュレーションを用いた面対面複探針用の電極の最小寸法の推定
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Material:
Volume:Page: 906-909 (WEB ONLY)  Publication year: Sep. 30, 2009 
JST Material Number: U0225A  ISSN: 1883-9630  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Plasma diagnostics 

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