Art
J-GLOBAL ID:201102260489560528   Reference number:11A0436821

Fabrication of uniform poly-Si thin film on glass substrate by AlC

AlCによるガラス基板への均一なポリ-Si薄膜の作製
Author (1):
Material:
Volume: 451-52  Page: 485-488  Publication year: 2004 
JST Material Number: O6387A  ISSN: 0040-6090  Document type: Article
Country of issue: Other (ZZZ)  Language: ENGLISH (EN)
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page