Art
J-GLOBAL ID:201102262190692358   Reference number:10A1724701

Photo-induced evolution of copper sheets from cluster molecules and its application to photolithographic copper patterning

集団分子とそのアプリケーションから写真平板銅のパタニングへの銅板の光誘導性進化
Author (5):
Material:
Volume: 43  Issue: 1-3  Page: 287-290  Publication year: 2007 
JST Material Number: O2202A  ISSN: 1434-6060  Document type: Article
Country of issue: Other (ZZZ)  Language: ENGLISH (EN)

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