Art
J-GLOBAL ID：201102270564117886 Reference number：11A0308201
Density comparison measurements of silicon crystals by a pressure-of-flotation method at NMIJ
NMIJの浮遊圧力法によるシリコン結晶の密度比較測定
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Author (2)：
WASEDA A
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FUJII K
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Material：
METROLOGIA
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Volume：
41
Issue：
2
Page：
S62-S67
Publication year：
2004
JST Material Number：
O4660A
ISSN：
0026-1394
Document type：
Article
Country of issue：
Other (ZZZ)
Language：
ENGLISH (EN)
Terms in the title (3)：
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浮遊
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シリコン結晶
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密度
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