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Art
J-GLOBAL ID:201102273986321400   Reference number:11A0309182

High-performance ultra-small single crystalline silicon microphone of an integrated structure

集積構造の高性能超小型単結晶シリコンマイクロフォン
Author (8):
Material:
Volume: 67-8  Page: 508-519  Publication year: 2003
JST Material Number: O4682A  ISSN: 0167-9317  Document type: Article
Country of issue: Other (ZZZ)  Language: ENGLISH (EN)
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.

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