Term
J-GLOBAL ID：201106058685012866
ultraviolet lithography
Subject category：
Subject category
Subject category of the technical term.
電子素子
Related terms (1)：
ultraviolet radiation
(紫外線)
About ultraviolet radiation
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Broader terms (1)：
lithography
(リソグラフィー)
About lithography
Search "lithography"
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